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Keywords: 2
4
Units
4
File types
4
NPOINT
cable length (CABLE_LENGTH)
4
capacitance (CAPACITANCE)
4
closed-loop travel (CLOSED_LOOP_TRAVEL)
4
controller (CONTROLLER)
4
footprint (FOOTPRINT)
4
integrated sensor (INTEGRATED_SENSOR)
4
material (MATERIAL)
4
max force (pushpull) (MAX_FORCE__PUSHPULL_)
4
maximum load (MAXIMUM_LOAD)
4
nanomotion control (NANOMOTION_CONTROL)
4
open-loop travel (-30 to 150 v) (OPEN_LOOP_TRAVEL___30_TO_150_V_)
4
part number (PART_NUMBER)
4
position noise (POSITION_NOISE)
4
resonant frequency (RESONANT_FREQUENCY)
4
settling time (SETTLING_TIME)
4
stage mass (STAGE_MASS)
4
stiffness (STIFFNESS)
3
name (NAME)
4
sourceurl (SOURCEURL)
4
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